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发明名称
VORRICHTUNG ZUM BE- UND ENTLADEN VON SUBSTRATEN
摘要
申请公布号
DE50014324(D1)
申请公布日期
2007.06.21
申请号
DE20005014324
申请日期
2000.09.20
申请人
HAMATECH AG
发明人
WEBER, KLAUS;SAEMANN, MARTIN;KALLIS, JUERGEN
分类号
H01L21/00;B65G49/07;G11B23/00;H01L21/677
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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