METHOD OF FABRICATING SUBSTRATE WITH NANO PATTERN AND LIGHT EMITTING DEVICE USING THE SUBSTRATE

摘要

A method for manufacturing a substrate with a nano pattern and a light emitting device using the substrate manufactured thereby are provided to realize mass-production and to economize substrate fabrication costs by performing an etching process on the substrate using an agglomerated portion of a nano size as an etch mask. A protection layer is formed on a substrate(100). A thin film including metal is formed on the protection layer. A plurality of agglomerated portions of nano size are formed on the protection layer by performing a heat treatment on the thin film. The protection layer is vertically etched by using the plurality of agglomerated portions as an etch mask. The plurality of agglomerated portions are removed. A plurality of nano rods(105) are formed on the resultant structure by performing a vertical etching process on the substrate using the protection layer as an etch mask.