METHODS AND APPARATUS FOR OPENING AND CLOSING SUBSTRATE CARRIERS

摘要

A method and apparatus of opening/closing a substrate carrier are provided to transfer stably a substrate without the exposure of the substrate to potential contaminants by using a load port with an improved door opening mechanism. An apparatus includes a substrate carrier for fixing one or more substrates and a load port. The load port is used for storing the substrate carrier supplied from a substrate carrier transfer system. The load port includes a door opening unit(2415). The door opening unit is used for fixing a substrate carrier door by using a vacuum pressure. The door opening unit includes a port capable of applying the vacuum pressure supplied from a vacuum supply source to the substrate carrier door.