METHODS AND APPARATUS FOR DEFECT LOCALIZATION,申请号EP20020768957-传众专利搜索

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发明名称	METHODS AND APPARATUS FOR DEFECT LOCALIZATION
摘要
申请公布号	EP1438732(A4)	申请公布日期	2007.06.20
申请号	EP20020768957	申请日期	2002.10.01
申请人	KLA-TENCOR TECHNOLOGIES CORPORATION	发明人	NASSER-GHODSI, MEHRAN;REICHERT, JEFFREY
分类号	G01N23/225;H01L21/66;G01B15/02;H01J37/244;H01J37/28	主分类号	G01N23/225
代理机构		代理人
主权项
地址

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