| 摘要 |
A phase shifting imaging module 74 in a handheld imager (10, Fig. 1) is provided. The system is particularly used for surface topography measurements. The phase shifting imaging module 74 includes a first beam splitter 90 configured to split an image radiation beam 72 into first 92 and second 94 image radiation beams. It also includes a first prism 96 configured to align the first 92 and second 94 image radiation beams, and a second beam splitter 98 configured to split the first 92 and second 94 image radiation beams into four image radiation beams. A second prism 100 aligns the four image radiation beams. A phase mask 80 introduces phase retardation between the four image radiation beams, resulting in four phase shifted image radiation beams 102, 104, 106, 108. A pixilated sensor 82 generates image data (84, Fig. 2) based upon each of the four phase shifted image radiation beams 102, 104, 106, 108. A portable interferometer (26, Fig. 2) including the phase shifting imaging module 74 may comprise two radiation sources (28, 30, Fig.2) radiating at different wavelengths, configured to illuminate a part surface (16, Fig. 2) to be tested, and a lens (44, Fig.2) and polarizer (52, Fig.2).
|
