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发明名称
摘要
申请公布号	JP3935022(B2)	申请公布日期	2007.06.20
申请号	JP20020235904	申请日期	2002.08.13
申请人		发明人
分类号	C23C22/07;C23C22/13;C23C22/22;C23C22/82	主分类号	C23C22/07
代理机构		代理人
主权项
地址

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