| 摘要 |
Provided is a vertical comb-type electrode structure capable of a large linear-displacement motion. The vertical comb-electrode structure includes: a first substrate including a plurality of vertical static comb-electrodes; and a second substrate stacked on an upper surface of the first substrate, the second substrate including a plurality of vertical moving comb-electrodes, wherein the static comb-electrodes vertically move a predetermined distance toward the moving comb-electrodes so that no gaps between the static comb-electrodes and the moving comb-electrodes exist.
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