发明名称 DEVICE FOR ADJUSTING GAP BETWEEN AIR KNIFE AND SUBSTRATE
摘要 A device is provided to improve the efficiency of working by adjusting the gap quickly and exactly and spray angle between an air knife and a substrate. A device includes upper and lower air knives, a distance adjusting unit, a distance detecting unit, and a gauge unit. The upper and lower air knives are spaced apart from each other to spray a compressed dry air to both surfaces of a substrate. The distance adjusting unit(100) is used for adjusting the distance between the air knives and the substrate. The distance detecting unit(200) is used for displaying the degree of distance between the air knives and the substrate. The gauge unit(300) is used for measuring the amount of vertical displacement of the air knives.
申请公布号 KR20070064145(A) 申请公布日期 2007.06.20
申请号 KR20050124747 申请日期 2005.12.16
申请人 K.C.TECH CO., LTD. 发明人 LIM, KUN YOUNG
分类号 H01L21/304 主分类号 H01L21/304
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