HEAT TREATING SYSTEM AND HEAT TREATING METHOD,申请号EP20030769959-传众专利搜索

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发明名称	HEAT TREATING SYSTEM AND HEAT TREATING METHOD
摘要
申请公布号	EP1557873(A4)	申请公布日期	2007.06.20
申请号	EP20030769959	申请日期	2003.10.29
申请人	TOKYO ELECTRON LIMITED	发明人	FUJITA, TAKEHIKO;OKADA, MITSUHIRO;UMEZAWA, KOTA;HASEBE, KAZUHIDE;SAKAMOTO, KOICHI
分类号	C23C16/46;H01L21/205;C23C16/52;F27B17/00;H01L21/00	主分类号	C23C16/46
代理机构		代理人
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