APPARATUS AND METHOD FOR COLLECTION CARBON NANO TUBE

摘要

A synthesis method of carbon nano-tubes is provided to ensure stability of the synthesis reaction after completely removing oxygen from a reaction chamber and to block opening of the reaction chamber in advance by fabricating a synthesis system having a gas exhausting part to output source gas. The method includes the steps of: loading a synthetic substrate inside a reaction chamber(100); removing residual oxygen from inner space of the reaction chamber; synthesizing carbon nano-tubes on the surface of the synthetic substrate by supplying source gas to the chamber when the temperature of chamber reaches a processing temperature; and unloading the synthetic substrate combined with the carbon nano-tubes by opening the chamber. The method is practically performed by using a synthesis apparatus having a gas exhausting part(180) that has a main exhausting line(185), a blow exhausting line(186) and a vacuum exhausting line(187) and a control part.