发明名称 |
JIG FOR DETACHABLY SUPPORTING A PUMP AND METHOD OF SUPPORTING A PUMP USING THE SAME |
摘要 |
A pump attaching/detaching jig and a method for attaching/detaching a pump using the same are provided to install a turbo pump at a correct position at an accurate angle by using a jig of which angle and positioning are easily adjusted. A cylinder(110) is fixed to a bottom at one side thereof. First and second supports(120,130) are respectively fitted and fixed to both sides of the cylinder. A pump base(140) is positioned between the first and second supports, and supports a pump which is movable up and down. The pump base has a first base(141) supporting a bottom of the pump and a second base mechanically fastened to the first base and fitted in the cylinder to fix the first base.
|
申请公布号 |
KR20070063949(A) |
申请公布日期 |
2007.06.20 |
申请号 |
KR20050124372 |
申请日期 |
2005.12.16 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHOI, IK SUN;YU, SOO GUN;PARK, JIN BEOM |
分类号 |
H01L21/02;H01L21/205 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|