发明名称 JIG FOR DETACHABLY SUPPORTING A PUMP AND METHOD OF SUPPORTING A PUMP USING THE SAME
摘要 A pump attaching/detaching jig and a method for attaching/detaching a pump using the same are provided to install a turbo pump at a correct position at an accurate angle by using a jig of which angle and positioning are easily adjusted. A cylinder(110) is fixed to a bottom at one side thereof. First and second supports(120,130) are respectively fitted and fixed to both sides of the cylinder. A pump base(140) is positioned between the first and second supports, and supports a pump which is movable up and down. The pump base has a first base(141) supporting a bottom of the pump and a second base mechanically fastened to the first base and fitted in the cylinder to fix the first base.
申请公布号 KR20070063949(A) 申请公布日期 2007.06.20
申请号 KR20050124372 申请日期 2005.12.16
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI, IK SUN;YU, SOO GUN;PARK, JIN BEOM
分类号 H01L21/02;H01L21/205 主分类号 H01L21/02
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