发明名称 METHOD FOR ORGANIC THIN FILM FORMATION, ASSISTANT FOR ORGANIC THIN FILM FORMATION, AND SOLUTION FOR ORGANIC THIN FILM FORMATION
摘要 An organic thin film forming method for forming an organic thin film on a substrate surface comprising: contacting the substrate with a solution for forming an organic thin film obtained from an auxiliary agent for forming an organic thin film obtained by mixing a metal surfactant (1) having at least one hydrolytic group and a compound capable of interacting with the metal surfactant (1), and a metal surfactant (2) having at least one hydrolytic group, in an organic solvent, wherein a solution for forming an organic thin film is used in which the moisture content has been adjusted or maintained to be within a predetermined range; an organic thin film forming method for forming an organic thin film on a substrate surface comprising: contacting the substrate with an organic solvent solution obtained by mixing a metal surfactant having at least one hydrolytic group and a catalyst capable of interacting with the surfactant, wherein the organic solvent solution contains a predetermined amount of moisture, and contains 20 to 2000 ppm of a hydroxide group-containing compound which is a hydrolysis product of the metal surfactant; and, an auxiliary agent for forming an organic thin film and a solution for forming an organic thin film used in this method.
申请公布号 EP1797967(A1) 申请公布日期 2007.06.20
申请号 EP20050766433 申请日期 2005.07.21
申请人 NIPPON SODA CO., LTD. 发明人 KIMURA, NOBUO;FUJITA, YOSHITAKA;HIDAKA, TOMOYA
分类号 B05D1/18;C03C17/28;C03C17/30 主分类号 B05D1/18
代理机构 代理人
主权项
地址