GROUP III NITRIDE LIGHT RECEIVING AND EMITTING DEVICES USING TRANSPARENT CONDUCTING OXYNITRIDE-BASED MULTI N-TYPE SCHOTTKY AND OHMIC CONTACT LAYERS AND METHOD OF MANUFACTURING THEREOF

摘要

An optical device and its manufacturing method are provided to improve current-voltage characteristics and to enhance the efficiency of device by enhancing ohmic contact interfacial characteristics with an N type nitride based clad layer using a TCON(Transparent Conducting OxyNitride) layer. A high transparent multi-N type schottky contact layer(20) is formed on an N type nitride based clad layer(10). The high transparent multi-N type schottky contact layer includes at least one TCON layer. The main gradient of the TCON layer is one selected from a group consisting of In, Zn, Cd, Ga, Al, Mg, Ti, Mo, Ta, V, Cr, Nb, Zr, Ag, Ni, Cu, Co, Au, Pt, Re, Ir, W, Ru or Pd.