| 摘要 |
Thermal processing equipment is provided to prevent damage of an inner tube which is assembled to a flange, by interposing a sealing member between the inner tube and the flange. An inner tube(130) is disposed in an outer tube(120). A flange(140) is disposed under the outer tube and the inner tube to support the outer tube and the inner tube. A sealing member(150) is interposed between the inner tube and the outer tube. A first groove is formed on a lower end of the inner tube, in which the sealing member is disposed. A second groove is formed on an upper end of the flange, in which the sealing member is disposed.
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