发明名称 Method and apparatus for depositing charge and/or nanoparticles
摘要 A method and apparatus for use in depositing electrical charge and/or nanoparticles is provided. A stamping process is used in which a stamp having a flexible layer such as a flexible semiconductor layer applies a charge pattern on a substrate. Other techniques include lithographic patterning, the use of pre-patterned dissimilar materials, deposition by ions or radiation, the use of differing work functions, the use of liquid phase materials. Deposition monitoring techniques and apparatuses are also provided.
申请公布号 US7232771(B2) 申请公布日期 2007.06.19
申请号 US20040982179 申请日期 2004.11.04
申请人 REGENTS OF THE UNIVERSITY OF MINNESOTA 发明人 JACOBS HEIKO O.;BARRY CHAD
分类号 H01L21/31;B05D1/12;B05D5/00;G03G5/02;G03G5/153;H01L21/469 主分类号 H01L21/31
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