| 摘要 |
A sensor comprises a semiconductor pellet ( 10 ) including a working portion ( 11 ) adapted to undergo action of a force, a fixed portion ( 13 ) fixed on the sensor body, and a flexible portion ( 13 ) having flexibility formed therebetween, a working body ( 20 ) for transmitting an exterted force to the working portion, and detector means ( 60-63 ) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers ( 101-109 ) and analog adders/subtracters ( 111-113 ), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E 3 , E 4- E 8 ) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal ( 21, 22 ) is provided around the working body ( 20 ). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate ( 350, 350' ).
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