| 摘要 |
A microscope system comprises a light guiding optical system 20 containing an objective lens 21 and a beam splitter 25 for splitting an optical image of a sample S to a first optical path and a second optical path, a photodetector 31 disposed on the first optical path used to acquire an image of the sample S, and a CCD camera 32 disposed on the second optical path for acquiring a two-dimensional image for focus control. The camera 32 is disposed being inclined at an angle of theta with respect to the optical path so that the optical path length in the light guiding optical system 20 varies along the z-axis direction. The image acquired by the camera 32 is analyzed by a focus controller 37 , and the focal point for image pickup with respect to the sample S is controlled on the basis of the analysis result. Accordingly, there can be implemented a microscope system in which image acquisition of the sample and focus control for image pickup can be simultaneously performed.
|
