发明名称 Method of making floating-gate memory-cell array with digital logic transistors
摘要 A nonvolatile memory array is encased in a P-well, and the P-well encased in a deep N-well, the two wells separating the memory array from the integrated circuit substrate and from the other circuitry of the integrated circuit. At the same time the deep N-well is formed for the nonvolatile memory array, deep N-wells are formed for the high-voltage P-channel transistors of the logic circuitry. At the same time the P-well is formed for the nonvolatile memory array, P-wells are formed for the low-voltage N-channel transistors. The memory array contains nonvolatile cells of the type used in the ultra-violet-erasable EPROMs. During erasure, the isolated-well formation allows the source, the drain and the channel of selected cells to be driven to a positive voltage. The isolated well is also driven to a positive voltage equal to, or slightly greater than, the positive voltage applied to the source and drain, thus eliminating the field-plate breakdown-voltage problem.
申请公布号 USRE39697(E1) 申请公布日期 2007.06.19
申请号 US20030692272 申请日期 2003.10.22
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MAROTTA GIULIO-GIUSEPPE;SANTIN GIOVANNI;SMAYLING MICHAEL C.;MATSUOKA MISAKO A.;FUKAWA SATORU
分类号 H01L21/8238;H01L21/8247;H01L27/105 主分类号 H01L21/8238
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