INK JET PRINTING SYSTEM AND MANUFACTURING METHOD OF THIN FILM TRANSISTOR ARRAY PANEL USING THE SAME

摘要

An ink jet printing system and a manufacturing method of a thin film transistor array panel using the dame are provided to adjust a solvent vapor pressure in a dry chamber to improve crystallization of an organic semiconductor. An ink jet printing system includes an ink jet printing chamber(51), and a dry chamber(52). The ink jet printing chamber performs an ink jet printing process. The dry chamber is spaced a predetermined gap from the ink jet printing chamber to adjust a vapor pressure. The ink jet printing chamber includes a stage(510), a head unit(700), and a conveyance device(300). The stage is installed in the ink jet printing chamber to mount a substrate thereon. The head unit is disposed over the stage and spaced a predetermined gap from the stage. The conveyance device conveys the heat unit onto a predetermined position. The head unit includes an alignment sensor for aligning a position of the ink jet head.