发明名称 |
Method for fabricating semiconductor device with recessed channel region |
摘要 |
Disclosed is a method for fabricating a semiconductor device with a plurality of recessed channel regions. This method includes the steps of: forming a plurality of device isolation layers in a substrate; forming a hard mask nitride layer, a hard mask oxide layer and a hard mask polysilicon layer on the device isolation and the substrate, thereby obtaining a hard mask pattern; forming a plurality of trenches in the predetermined regions of the substrate with use of the hard mask pattern to expose a plurality of recessed channel regions; selectively removing the hard mask pattern; and forming a plurality of gate structures in the plurality of trenches.
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申请公布号 |
US7232727(B2) |
申请公布日期 |
2007.06.19 |
申请号 |
US20040030438 |
申请日期 |
2004.12.22 |
申请人 |
HYNIX SEMICONDUCTOR, INC. |
发明人 |
PARK SOO-YOUNG |
分类号 |
H01L21/336;H01L29/78;H01L21/00;H01L21/335;H01L21/76;H01L21/8234;H01L21/8242 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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