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发明名称
Pattern amendment apparatus
摘要
申请公布号
KR100729157(B1)
申请公布日期
2007.06.19
申请号
KR20000019184
申请日期
2000.04.12
申请人
发明人
分类号
H01J9/24;H01J9/50;G01N21/00;H01J11/22;H01J11/34;H01J11/36
主分类号
H01J9/24
代理机构
代理人
主权项
地址
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