| 摘要 |
A plurality of probes such as a signal probe ( 3 ) and a power supply probe ( 4 ) are provided into a metal block ( 1 ) so as to penetrate. Each of the probes has a movable pin ( 11 ). A tip of the movable pin is projecting from one surface of the metal block ( 1 ). And a projection length of the tip is variable. A DUT 20 is pressed onto the surface of the metal block ( 1 ) to contact between electrode terminals ( 21 to 24 ) and tips of the probes to test characteristics of the DUT. At least one of the probes is capacity loaded probe having a capacitor by providing a dielectric layer and a metal film to peripheral of the probe. As a result, noise can be removed reliably. Additionally, when the capacity loaded probe is used as the power supply probe, a voltage drop is reduced at the power supply terminal in a case of change of the output.
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