| 摘要 |
A cassette for loading substrates and a monitoring system thereof are provided to remotely monitor loading of the substrates used for manufacturing an LCD in real-time through RF communication. A loading detection device(100) wirelessly transmits a loading signal by detecting the loading of the substrates supported with a support bar. A process manager(200) manages and outputs loading information by receiving the loading signal. The loading detection device includes a loading detector(110) for detecting the loading of the substrates supported with the support bar, and an RF(RADIO FREQUENCY) transmitter(120) converting the loading detection signal into an RF signal and transmitting the RF signal to the process manager.
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