发明名称 Reflector device
摘要 In a reflecting mirror, a plurality of segmented mirrors are grouped into a plurality of groups of a cluster, and are supported by a plurality of sub mirror cells. The plurality of sub mirror cells are supported by a mirror cell, and all the segmented mirrors are supported by the mirror cell. A reference cell is supported by a plurality of force support mechanisms disposed in the mirror cell with the reference cell being nearly in a weightlessness state. Projections and depressions are prevented from occurring in an axial direction of the reflecting mirror due to a self weight deformation, and the reference cell can be used as a reference surface for control of the positions of the plurality of segmented mirrors and those of the plurality of cluster mirrors in the axial direction of the reflecting mirror.
申请公布号 US7232232(B2) 申请公布日期 2007.06.19
申请号 US20060569272 申请日期 2006.02.23
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 OSHIMA TAKEHARU;ITO NOBORU
分类号 G02B5/08 主分类号 G02B5/08
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