| 摘要 |
A spattering target used when a thin- film is manufactured by spattering and a method of manufacturing the spattering target. The spattering target comprises backing plates and a bonding material layer for sticking them to each other. A spacer is not present in the bonding material layer, the thickness of the bonding material layer is within the range of 0.25 to 2 mm, and the sticking surface of the target and the sticking surfaces of the backing plates are substantially kept parallel with each other.
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