APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

Semiconductor device manufacturing equipment is provided to restrain the damage of a cassette and a wafer and to improve the yield by preventing the generation of impact between cassettes due to the malfunction of a cassette transfer robot using a sensor and a control unit. Semiconductor device manufacturing equipment includes a cassette transfer robot and a control unit. The cassette transfer robot(210) includes a loading portion and a sensor. The loading portion(212) is used for loading stably a cassette(100) loaded with a plurality of wafers. The sensor(215) is used for detecting the existence of the cassette. The control unit(230) is used for controlling the operation of the cassette transfer robot according to the detected result of the sensor.