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发明名称
VORRICHTUNG FÜR EIN PLASMAVERFAHREN
摘要
申请公布号
AT362197(T)
申请公布日期
2007.06.15
申请号
AT20020708711T
申请日期
2002.03.28
申请人
OHMI, TADAHIRO;TOKYO ELECTRON LIMITED
发明人
OHMI, TADAHIRO;HIRAYAMA, MASAKI;SUGAWA, SHIGETOSHI;GOTO, TETSUYA
分类号
H01L21/31;H05H1/46;H01J37/32;H01L21/302;H01L21/3065
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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