CAMERA FOR DETECTING SAMPLE POSITION

摘要

A position detecting camera is provided to make a barrel to slide when vertically moving the barrel in order to focus on a sample in a semiconductor manufacturing apparatus using the camera so that the optical axis of the barrel is not changed to prevent reduction of productivity. A position detecting camera includes a cylindrical barrel(100), a plurality of slide guides(300), a barrel housing(200), and a fixing part(400,420). The plurality of slide guides is protruded from the outer wall of the barrel and guides vertical movement of the barrel. The barrel housing surrounds the barrel and has grooves in which the slide guides are moved. The fixing part is combined with each slide guide through a hole(210) formed at the outer wall of the barrel housing to fix the barrel.