ETCHANT COMPOUND FOR ETCHING ELECTRODE OF LIQUID CRYSTAL DISPLAY DEVICE

摘要

An etchant compound for etching an electrode of a liquid crystal display device is provided to etch a multi-layered film altogether using identical etchant liquid in one device and to give excellent profile to the multi-layered film. The etchant compound for etching an electrode of a liquid crystal display device comprises 40-70 wt% of phosphoric acid; 3-15 wt% of nitric acid; 5-35 wt% of acetic acid functioning as a buffer for adjusting a reaction rate; 0.02-5 wt% of a chlorine-based compound that is dissociated into Cl^-1; 0.05-5 wt% of a nitrate-based compound; and the rest of water. As the chlorine-based compound, KCl, HCl, LiCl, NH4Cl, NaCl, FeCl3, FeCl2, CaCl2, NiCl2, ZnCl2, AlCl3, BaCl2, BeCl2, BiCl3, CdCl2, CsCl2, H2PtCl6 or CrCl3 is preferably used. Furthermore, as the nitrate-based compound, NH4NO3, KNO3, LiNO3, Ca(NO3)2, NaNO3, Zn(NO3)2, Co(NO3)2, Ni(NO3)2, Fe(NO3)3, Cu(NO3)2 or Ba(NO3)2 is preferably used.