TEMPERATURE CONTROL APPARATUS, EXPOSURE APPARATUS, TEMPERATURE CONTROL METHOD AND DEVICE MANUFACTURING METHOD

摘要

A temperature control apparatus controls the temperature of a body (104), the temperature of which is to be controlled, to be at a prescribed temperature by means of a first medium flowing in a circulation flow path. The temperature control apparatus is provided with a first heat exchanger (54), which exchanges heat between the first medium and a second medium (B) which is supplied from a supply source independent from a processing apparatus and the temperature control apparatus and is at a temperature lower than the prescribed temperature, and a second heat exchanger (52) which exchanges heat between the first medium and a third medium (C) which is at a temperature higher than the prescribed temperature.