| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical device having closely lined up transverse grooves from a wafer in high yield, and to provide the optical device manufactured in high yield. <P>SOLUTION: In the method of manufacturing an optical device (1) having transverse grooves (8) which are closely lined up and extending in the transverse direction (6b) of the optical device, the elements (4) of an optical device (1) are arranged on an wafer (6); half-cut grooves deeper than the transverse grooves (8) are formed at the positions on the upper face (10) of the wafer (6) at which positions the transverse grooves (8) formed on the optical device (1) terminate; the transverse grooves (8) which are closely lined up and extending in the transverse direction (6b) are formed so as to cross the half-cut grooves (26); upright parts (24) are formed between adjacent transverse grooves (8), and the wafer (6) is cut along the half-cut grooves (26) which are in the crossing direction (6a) of the transverse grooves (8) by using a blade having a width shorter than the length in the transverse direction (6b) of the half-cut grooves. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
