| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for automatically and temporarily adhering a sheet material (coverlay, reinforcing plate) with higher accuracy to a flexible substrate. SOLUTION: After correction of displacement of a flexible substrate 1 fixed to a fixing surface 3a of a first table 3 and a coverlay film 2 fixed to a fixing surface 4a of a second table 4, the first table 3 goes downward up to the location just above the second table 4 with movement in the direction Z of a supporting arm 7, and the flexible substrate 1 fixed to the fixing surface 3a of the first table 3 and the coverlay film 2 fixed to the fixing surface 4a of the second table 4 are mutually overlapped. Moreover, under this condition, the flexible substrate 1 and the coverlay film 2 are thermally deposited at the multiple areas and are then adhered temporarily with a thermal deposition means 10. COPYRIGHT: (C)2007,JPO&INPIT
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