| 摘要 |
PROBLEM TO BE SOLVED: To obtain a thin film magnetic head capable of reducing coil resistance by sufficiently securing a coil cross-section area, and its coil forming method. SOLUTION: A recording coil is formed as follows in the thin film magnetic head. First a frame for constituting a coil formation area on a plating bedding film for coil formation is formed. Then, the plating bedding film exposing in the frame is etched, and etching rebounds of the plating bedding film are adhered again to the wall of the frame side. A non-magnetic metal film is formed with plating in the area constituted by the frame to obtain a recording coil in which the film thickness of both end parts in a coil width direction is greater than the thickness of the film at the central part. COPYRIGHT: (C)2007,JPO&INPIT
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