| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-precision position and posture adjustment device which can adjust the position and posture of an object to be adjusted with an inexpensive and simple mechanism. SOLUTION: The adjustment device 13 includes a telescopic mechanism extendable in a longitudinal axis direction and a universal mechanism 47 attached to the top of the telescopic mechanism. By extending or contracting the telescopic mechanism, the position and posture of a support 15 as the object to be adjusted is adjusted via the universal mechanism 47. The universal mechanism 47 has an in-plane movement mechanism which is movable along a plane perpendicular to the longitudinal axis direction and an oscillating device 23 which can oscillate against the longitudinal axis direction. COPYRIGHT: (C)2007,JPO&INPIT
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