| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration control device capable of obtaining satisfactory vibration removing effect while suppressing occurrence of hunting phenomenon. SOLUTION: This vibration control device 1 is provided with a pedestal 12 for loading an object to be vibration-free whose vibration is insulated, a pedestal supporting mechanism 20 having air springs 2a to 2d for supporting the pedestal 12, displacement sensors 5a to 5d for detecting displacement in the direction of height of the pedestal 12 supported through the air springs of the pedestal supporting mechanism 20, electromagnetic valves 6a to 6d for supplying air and electromagnetic valves 7a to 7d for exhausting air for supplying and exhausting air of the air springs 2a to 2d, and a controller 25 for controlling opening and closing of the electromagnetic valves 6a to 6d for supplying air and the electromagnetic valves 7a to 7d for exhausting air to return height of the pedestal 12 to a scope F of non-control height. COPYRIGHT: (C)2007,JPO&INPIT
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