发明名称 |
DEVICE COMPRISING A PIEZOACOUSTIC RESONATOR ELEMENT, METHOD FOR PRODUCING THE SAME AND METHOD FOR OUTPUTTING A SIGNAL DEPENDING ON A RESONANT FREQUENCY |
摘要 |
The invention relates to a device (31) which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a thickness oscillation of the piezoelectric layer (32) is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element (37) that is configured as a thin layer. |
申请公布号 |
WO2007028817(A3) |
申请公布日期 |
2007.06.14 |
申请号 |
WO2006EP66127 |
申请日期 |
2006.09.07 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT;GABL, REINHARD;SCHREITER, MATTHIAS |
发明人 |
GABL, REINHARD;SCHREITER, MATTHIAS |
分类号 |
H03H9/05;G01N29/02 |
主分类号 |
H03H9/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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