PROBE PIN, PROBE CARD, AND PROBE DEVICE

摘要

[PROBLEMS] To increase the life of a probe pin. [MEANS FOR SOLVING THE PROBLEMS] The contact part of the probe pin is formed of a tin smaller in strength than the electrode of a wafer (W). Thus, since the probe pin is broken when it is separated from the electrode, a part of the electrode can be prevented from adhering to the probe pin. A container for reserving a molten tin is installed on a probe device. The container is three-dimensionally movable by a moving mechanism so that the probe pin can be immersed into the molten tin in the container. Consequently, it is possible to supply the tin onto the surface of the broken probe pin.