COMPOSITE CHARGED PARTICLE BEAM SYSTEM

摘要

A method for constituting a composite charged particle beam system by which a TEM sample can be made efficiently using a gas ion beam system, an FIB and an SEM. The composite charged particle beam system comprises an FIB lens-barrel (1), an SEM lens-barrel (2), a gas ion beam lens-barrel (3), and a rotary sample stage (9) having an eucentric tilt mechanism and a rotating shaft (10) intersecting an eucentric tilt axis (8) perpendicularly. An arrangement is made such that a focusing ion beam (4), an electron beam (5) and a gas ion beam (6) intersect at one point, the axis of the FIB lens-barrel (1) and the axis of the SEM lens-barrel (2) intersect the eucentric tilt axis (8) perpendicularly, and the axis of the FIB lens-barrel (1), the axis of the gas ion beam lens-barrel (3) and the eucentric tilt axis (8) exist in one plane.