| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To further improve the gas treatment efficiency of an electrode apparatus for plasma discharge, in which non-equilibrium plasma is generated to treat a gas. <P>SOLUTION: The electrode apparatus 6 for plasma discharge, in which non-equilibrium plasma is generated to treat the gas, is provided with: a substrate 11 composed of a dielectric; an electrode 4 buried in the substrate 11; a catalyst 7 deposited on the substrate 11 for promoting reaction of the gas; and a secondary electron emitting agent 8 deposited on the substrate 11. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
