| 发明名称 |
Isolation body for semiconductor devices and method to form the same |
| 摘要 |
A semiconductor device and method for its fabrication are described. An isolation body may be formed prior to formation of an active region. In one embodiment, the isolation body is void-free.
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| 申请公布号 |
US2007132034(A1) |
申请公布日期 |
2007.06.14 |
| 申请号 |
US20050304016 |
申请日期 |
2005.12.14 |
| 申请人 |
CURELLO GIUSEPPE;BOHR MARK;DESHPANDE HEMANT V;TYAGI SUNIT |
发明人 |
CURELLO GIUSEPPE;BOHR MARK;DESHPANDE HEMANT V.;TYAGI SUNIT |
| 分类号 |
H01L29/76 |
主分类号 |
H01L29/76 |
| 代理机构 |
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代理人 |
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