| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an opening and closing device for a photomask storage container for opening and closing an upper cap of a storage container for carrying in or out a photomask, the device capable of opening and closing while keeping cleanliness of a substrate in a vertical laminar flow type clean room environment. <P>SOLUTION: The opening and closing device for a storage container is equipped with a first pedestal, a second pedestal, a column fixed to the backside of the device, an upper cap gripping tool at the upper top of the column, a first shaft of a vertical lifting mechanism, and a second shaft of a lateral sliding mechanism; wherein a storage container is mounted on the first pedestal on the first shaft, the first shaft is elevated to a position in contact with the upper cap gripping tool disposed at the uppermost position, the upper cap is gripped by the gripping tool, then the first shaft is descended by the vertical lifting mechanism to move the first pedestal and a base part of the container to a position in contact with the second pedestal on the second shaft; the container is transferred to be mounted on the second pedestal, and the second pedestal is moved to the foreground position of the device by the lateral sliding mechanism. <P>COPYRIGHT: (C)2007,JPO&INPIT |
