| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor capable of reducing the effects of errors generated due to the the temperature difference between a fluid and a base body. <P>SOLUTION: The flow sensor comprises the diaphragm 3, provided with the surface of the base body 2; the heater 4 provided on the diaphragm 3 for heating the fluid-flowing in the flow path; and a plurality of temperature sensors, provided on the diaphragm 3 around the heaters 4 for detecting the temperature of the fluid and outputting the temperature signal, where all or a part of the plurality of temperature sensors are constituted with thermopiles, cold joints and hot joints of which are arranged on the diaphragm 3, and the hot joints are arranged close to the side near the heater 4 and the cold joints are arranged on a side farther away to the heater 4, and also the position of the cold point receives effects from the fluid temperature than from the temperature of the base body 2. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
