| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card achieving cost reduction and making an ingenious plan to apply local magnetic fields and high-frequency magnetic fields to a magnetic field sensing section at high accuracy. SOLUTION: The probe card is characterized by including a substrate 11 supporting a probe pin 4 and an electromagnet 8 which, when the probe pin 4 supported by the substrate 11 contact a magnetic sensor terminal 74 of a single chip on a wafer 7, supplies magnetic force to a magnetic field sensing section 72 of the identical chip with the chip. COPYRIGHT: (C)2007,JPO&INPIT
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