发明名称 RADIATION DETECTING UNIT AND RADIATION INSPECTING APPARATUS
摘要 A detecting board (22) is provided with a wiring board (24), a semiconductor detecting element (25) firmly fixed on the upper plane of the wiring board (24) for detecting radiation and a spacer (28) firmly fixed on the upper plane of the wiring board (24), and a plurality of detecting boards are stacked and fixed. On each of the detecting boards (22), the semiconductor detecting element (25) and the spacer (28) are arranged to have a prescribed positional relationship. Furthermore, the detecting boards (22) are stacked by being aligned by the spacers (28) on an X-Y plane, and are fixed by fixing members (23a, 23b). The spacer (28) is provided with a step section (28e) so that the lower plane of the wiring board (24) is not brought into contact with the spacer (28) under the lower plane, and in the vertical direction, the spacers (28) are positioned by being brought into contact with each other.
申请公布号 WO2007066616(A1) 申请公布日期 2007.06.14
申请号 WO2006JP324174 申请日期 2006.12.04
申请人 SUMITOMO HEAVY INDUSTRIES, LTD.;UKITA, AKIHIRO 发明人 UKITA, AKIHIRO
分类号 G01T1/24;G01T1/161;H01L31/09 主分类号 G01T1/24
代理机构 代理人
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