POLYSILOXANE AND RADIATION-SENSITIVE RESIN COMPOSITION

摘要

Disclosed is a polysiloxane having a structural unit represented by the general formula (III) or general formula (IV) below, which is obtained by polycondensating a silane compound represented by the general formula (I) or general formula (II) below in the presence of water. Also disclosed is a radiation-sensitive resin composition containing such a polysiloxane and a radiation-sensitive acid generator. (In the formulae, R<SUP>1</SUP>, R<SUP>2</SUP>, R<SUP>3</SUP> and R<SUP>4</SUP> are as defined in the description.)