发明名称 |
Verfahren zur Anlagenanpassung für einen Halbleiterherstellungsprozess |
摘要 |
The test results of wafers processed through different paths comprising serial combinations of tools, are obtained respectively. The difference between the test results and a target value is calculated, to obtain respective estimate values, based on which one of the path is selected. An Independent claim is also included for apparatus of tool matching for semiconductor manufacturing process. |
申请公布号 |
DE10160961(B4) |
申请公布日期 |
2007.06.14 |
申请号 |
DE2001160961 |
申请日期 |
2001.12.12 |
申请人 |
PROMOS TECHNOLOGIES INC. |
发明人 |
CHIOU, HUNG-WEN;TSO, CHIA-CHUN |
分类号 |
H01L21/02;G05B19/418;H01L21/00;H01L21/66 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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