| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromachine which is reduced in cost, and increased in value added, by shortening a time period necessary for sacrifice layer etching, and preventing a structural layer from adhering to a substrate after the sacrifice layer etching, i.e. by improving throughput and yield. SOLUTION: The micromachine has a plurality of structures different in function from each other. In a process of manufacturing the micromachine, etching of the sacrifice layer 101 is conducted in multiple steps. Out of the multiple steps of the sacrifice layer etching, a sacrifice layer section that does not overlap the structural layer 102 is removed in the former sacrifice layer etching, and a sacrifice layer section that is under the structural layer is removed in the latter sacrifice layer etching. COPYRIGHT: (C)2007,JPO&INPIT |
