| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern formation method for improving the shape controllability of patterns formed of droplets by maintaining precision of the landing positions of the discharged droplets and precision of the irradiation position of laser light, and a droplet discharge device therefor. SOLUTION: A turn stage 29 which turns by using a landing position PF as a turning axis is provided in the side of a substrate 2 of a carriage 27. A discharge head 32 and a laser head 37 are disposed on the turn stage 29. The landing position PF is arranged to be positioned in the formation direction (discharge direction A1) of each nozzle N and the direction of the light axis (irradiation direction A2) of an irradiation opening 38. COPYRIGHT: (C)2007,JPO&INPIT
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