发明名称 Distributor and distributing method, plasma processing system and method, and process for fabricating lcd
摘要 A distributor ( 30 ) includes a square waveguide ( 31 ) to be connected to a microwave oscillator ( 20 ) and a square waveguide ( 41 ) having a plurality of openings ( 43 ) formed in a narrow wall ( 41 B). The square waveguide ( 31 ) is hollow. A wave delaying member ( 53 ) having a relative dielectric constant epsilon<SUB>r </SUB>is arranged in the square waveguide ( 41 ). Narrow walls ( 31 A, 41 A) of the two square waveguides ( 31, 41 ) are brought into contact with each other, and a communication hole ( 32 ) through which the two waveguides ( 31, 41 ) communicate with each other is formed in the narrow walls ( 31 A, 41 A). The widths of the two waveguides ( 31, 41 ) do not become narrow at their connecting portion even if the width of the communication hole ( 32 ) is decreased. Thus, a band of a frequency that can pass through the connecting portion is suppressed from becoming narrow. Consequently, reflection loss that occurs when the frequency of electromagnetic waves to be input to the distributor ( 30 ) changes can be decreased.
申请公布号 US2007133919(A1) 申请公布日期 2007.06.14
申请号 US20040591294 申请日期 2004.03.10
申请人 TOKYO ELECTRON LIMITED 发明人 OHMI TADAHIRO;GOTO NAOHISA;KUGA NOBUHIRO;HIROE AKIHIKO
分类号 G02F1/295;H01J37/32;H01P5/12 主分类号 G02F1/295
代理机构 代理人
主权项
地址