APPEARANCE INSPECTING DEVICE

摘要

[PROBLEMS] An appearance inspecting device for detecting a defect such as a scratch in the surface of an object to be inspected with an adequate resolution and judging the formed state of a film on the surface of the object while suppressing an increase of the throughput to an irreducible minimum. [MEANS FOR SOLVING PROBLEMS] An appearance inspecting device comprises an imaging unit (20) having line sensors (22R, 22G, 22B) having different color sensitivities and a processing unit (50). The processing unit (50) has pixel data acquiring means (S14) for acquiring pixel gray-scale data with a first pixel density from the gray-scale signal from a reference line sensor and acquiring pixel gray-scale data with a second pixel density lower than the first pixel density from the gray-scale signals from the line sensors other than the reference line sensor. Information representing the state of the surface of the object is created from the pixel gray-scale data acquired with the first pixel density and that acquired with the second pixel density.